Deposition
Wana ruzivo uye nekumhanyisa maitiro ekuvandudza.
Advanced Energy inopa magetsi uye kutonga mhinduro kune dzakaonda dzakatetepa firimu deposition application uye mudziyo geometries.Kugadzirisa zvipingamupinyi zvekugadzira wafer, yedu chaiyo shanduko yesimba mhinduro inobvumidza iwe kukwidziridza simba chairo, huroyi, kumhanya, uye kudzokorora maitiro.
Isu tinopa huwandu hwakawanda hweRF frequency, DC magetsi masisitimu, akagadziridzwa magetsi ekubuda mazinga, anofananidza matekinoroji, uye fiber optic tembiricha yekutarisa mhinduro dzinogonesa iwe kunyatso kudzora maitiro eplasma.Isu zvakare tinosanganisa Fast DAQ ™ uye yedu yekutora data uye yekuwanika suite kuti tipe maitiro ekuziva uye nekumhanyisa maitiro ekusimudzira.
Dzidza zvakawanda nezve yedu semiconductor yekugadzira maitiro kuti uwane mhinduro inokodzera zvaunoda.
Dambudziko Rako
Kubva pamafirimu anoshandiswa kuenzanisa zviyero zvedunhu zvakabatanidzwa kusvika kumafirimu ekuitisa uye anodzivirira (magadzirirwo emagetsi), kusvika kumafirimu esimbi (yakabatana), maitiro ako ekuisa anoda atomic-level control - kwete chete kune chimwe nechimwe chinhu asi kuyambuka yese wafer.
Kupfuura chimiro pachacho, ako akaiswa mafirimu anofanirwa kunge ari emhando yepamusoro.Ivo vanofanirwa kuve nevanodiwa zviyo chimiro, kufanana, uye conformal ukobvu, uye ive isina-isina - uye izvo zviri mukuwedzera pakupa zvinodikanwa zvemagetsi zvinonetsa (compressive uye tensile) uye zvinhu zvemagetsi.
Iyo yakaoma inongoramba ichiwedzera.Kuti ugadzirise zvipimo zvelithography (sub-1X nm node), kuzvigadzirisa kaviri uye kane maitiro ekugadzirisa zvinoda kuti deposition yako ibudise uye kubereka patani pane yega wafer.
Yedu Solution
Kana iwe uchiendesa yakanyanya kuomesesa deposition application uye mudziyo geometries, iwe unoda akavimbika musika mutungamiri.
Yepamberi Energy's RF magetsi kuburitsa uye yakakwirira-kumhanya yekufananidza tekinoroji inogonesa iwe kugadzirisa uye kukwidziridza kurongeka kwesimba, kunyatsoita, kumhanya, uye maitiro ekudzokorora anodiwa kune ese epamberi PECVD nePEALD deposition maitiro.
Shandisa yedu DC jenareta tekinoroji kugadzirisa yako inogadzirika arc mhinduro, kurongeka kwesimba, kumhanya, uye maitiro ekudzokorora kunodiwa PVD (sputtering) uye ECD deposition process.
Benefits
● Kusimbiswa kweplasma uye maitiro ekudzokorora kunowedzera goho
● Precise RF uye DC kuendeswa nekutonga kwakazara kwedhijitari kunobatsira kugadzirisa kushanda zvakanaka
● Kukurumidza kupindura kune plasma shanduko uye arc management
● Multi-level pulsing with adaptive frequency tuning inovandudza etch rate selectivity
● Kutsigirwa kwepasi rose kunowanikwa kuti ive nechokwadi chepamusoro-soro uye kushanda kwechigadzirwa