MSB Series Medium Frequency Sputtering Power Supply

Tsanangudzo Pfupi:

RHH yakatevedzana RF simba rekupa rinotsamira payakakura RF chizvarwa tekinoroji kupa vatengi neRF magetsi emagetsi ane simba rakakura, yakakwirira chaiyo uye nekukurumidza kupindura.Nechikamu chinogona kusetwa, pulse controllable, digital tuning uye mamwe mabasa.Minda inoshandiswa: photovoltaic indasitiri, flat panel inoratidzira indasitiri, semiconductor indasitiri, indasitiri yemakemikari, marabhoritari, tsvakiridzo yesainzi, kugadzira, nezvimwe.

Maitiro anoshanda: plasma yakawedzera makemikari vapor deposition (PECVD), plasma etching, plasma kuchenesa, radio frequency ion sosi, plasma diffusion, plasma polymerization sputtering, reactive sputtering, nezvimwe.

Product Detail

Product Tags

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Features

● Zvitaera zvehafu-zvidhinha uye rack gomo

● Gamuchira dhijitari yakazara, ine nyore uye yakapfuma mashandiro menyu

● Frequency tuning, pulse uye pulse synchronization mabasa

● NeCEX phase synchronization function

● Basa rakakwana rekudzivirira

Product Detail

Input	Input voltage: AC220V±10% 3ΦAC380V±5% (Special specification inogona kugadzirwa)
Input	Input frequency: 47 ~ 63Hz
Output	Kubuda kakawanda: 13.56MHz, 27.12MHz, 40.68MHz
	Tuning range: ± 5%
	Kubuda simba: 1.5 ~ 5kW
	Regulation huwandu hwemagetsi ekubuda: 1 ~ 100%
	Kubuditsa impedance: 50Ω+j0
	Kubuda interface: mhando N
	Output mode: inoenderera, pulse
	Pulse frequency: 100Hz ~ 100kHz
	Basa kutenderera: 5 ~ 95%
Performance index	Simba chinhu: 0.98
	Frequency kugadzikana kurongeka: ± 0.005%
	Kubudirira: 75% (pakuyerwa kuburitswa)
	Harmonic: ＜-45dBc
	Kurasika: ＜-50dBc
	Yekunze kudzora interface: analog huwandu, kutaurirana uye kuwiriranisa
	Kukurukurirana maitiro: Standard RS485 yekukurukurirana interface;Optional Eteri CAT, maindasitiri Ethernet, nezvimwewo.
Ongorora: chigadzirwa chinoenderera mberi nekuvandudza uye kuita kuri kuramba kuchivandudza.Iyi tsananguro yeparameter ndeyekutarisa chete.